Boron trichloride (BCl3) 99.999% is a colorless gas with a characteristic odor and is soluble in water. It is a highly corrosive substance widely used in the semiconductor industry, for example, as an etchant in the etching process of semiconductor materials such as silicon.
Specifications:
|
Specification |
99.999% |
|
Oxygen |
≤ 1ppm |
|
Nitrogen |
≤ 4ppm |
|
Carbon Monoxide |
≤ 0.5ppm |
|
Carbon Dioxide |
≤ 2ppm |
|
Methane |
≤ 0.5ppm |
|
Phosgene |
≤ 1ppm |
Applications:
-
Chemical reagent in the pharmaceutical industry.
-
Boron source for p-type doping of silicon.
-
Carrier gas in resistor manufacturing.
-
Fire-resistant coatings.
-
Raw material for boron nitride production.
-
Metal refining.
-
Fiber optic production.
-
High-energy fuels and rocket propellants.
-
Plasma etching processes.
Packaging and storage:
-
Keep away from fire and heat sources.
-
Storage temperature should be maintained below 35°C (maximum storage temperature should not exceed 52°C).
-
Cylinders should be stored upright, with the container (valve) securely closed and the cylinder cap in place. It must be stored separately from other chemicals, and the storage area should be equipped with leak handling emergency equipment.
